Acetone and the precursor ligand acetylacetone: distinctly different electron beam induced decomposition?-Reference-Cited by-同舟云学术

Acetone and the precursor ligand acetylacetone: distinctly different electron beam induced decomposition?

Published:2015 Issue:2 Volume:17 Page:1204-1216
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Warneke Jonas¹²³⁴,Van Dorp Willem F.⁵⁶⁷⁸,Rudolf Petra⁵⁶⁷⁸,Stano Michal⁹¹⁰¹¹¹²,Papp Peter⁹¹⁰¹¹¹²,Matejčík Štefan⁹¹⁰¹¹¹²,Borrmann Tobias¹²³⁴,Swiderek Petra¹²³⁴

Affiliation:

1. University of Bremen

2. Institute of Applied and Physical Chemistry

3. D-28334 Bremen

4. Germany

5. Zernike Institute for Advanced Materials

6. University of Groningen

7. NL-9747 AG Groningen

8. The Netherlands

9. Department of Experimental Physics

10. Comenius University

11. 84248 Bratislava

12. Slovakia

Abstract

The electron-induced reactions of acetylacetone and acetone reveal why organic material is retained in electron beam induced deposition from acetylacetonate precursors.

Funder

Deutsche Forschungsgemeinschaft

European Cooperation in Science and Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2015/CP/C4CP04239E

Reference41 articles.

1. H. O. Pierson , Handbook of Chemical Vapor Deposition: Principles, Technology, and Applications, Noyes, Park Ridge, USA, 1999

2. Gas-assisted focused electron beam and ion beam processing and fabrication