Atomistic simulation of the FEBID-driven growth of iron-based nanostructures-Reference-Cited by-同舟云学术

Atomistic simulation of the FEBID-driven growth of iron-based nanostructures

Published:2022 Issue:18 Volume:24 Page:10807-10819
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Prosvetov Alexey¹^ORCID,Verkhovtsev Alexey V.¹^ORCID,Sushko Gennady¹,Solov'yov Andrey V.¹

Affiliation:

1. MBN Research Center, Altenhöferallee 3, 60438 Frankfurt am Main, Germany

Abstract

Irradiation-driven molecular dynamics simulations provide atomistic insights into the structure and morphology of metal deposits grown during the FEBID process.

Funder

Deutsche Forschungsgemeinschaft

H2020 Marie Skłodowska-Curie Actions

European Cooperation in Science and Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2022/CP/D2CP00809B

Reference57 articles.

1. Nanofabrication Using Focused Ion and Electron Beams , ed. I. Utke , S. Moshkalev and P. Russel , Oxford University Press , 2012

2. Nanofabrication: Nanolithography Techniques and Their Applications , ed. J. M. De Teresa , IOP Publishing Ltd , 2020

3. High-Fidelity 3D-Nanoprinting via Focused Electron Beams: Growth Fundamentals

4. Gas-assisted focused electron beam and ion beam processing and fabrication

5. The role of low-energy electrons in focused electron beam induced deposition: four case studies of representative precursors

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigating electron-induced dissociation dynamics in the organometallic precursor Fe(CO)₅: a nonadiabatic molecular dynamics approach;Journal of Physics D: Applied Physics;2024-06-24

2. Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment;Chemical Reviews;2024-06-06

3. Role of the Molecular Environment in Quenching the Irradiation-Driven Fragmentation of Fe(CO)₅: A Reactive Molecular Dynamics Study;The Journal of Physical Chemistry A;2023-04-19

4. Atomistic modeling of thermal effects in focused electron beam-induced deposition of Me$$_2$$Au(tfac);The European Physical Journal D;2023-01