1. International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, China
2. Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute of Changchun University of Science and Technology, Zhongshan 528400, China
3. Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Changchun 130022, China
4. College of Physics, Changchun University of Science and Technology, Changchun 130022, China
5. JR3CN & IRAC, University of Bedfordshire, Luton LU1 3JU, UK