Fabrication of flexible microlens arrays through vapor-induced dewetting on selectively plasma-treated surfaces

Author:

Bi Xiaopeng12345,Li Wen12345

Affiliation:

1. Microtechnology Laboratory

2. Department of Electrical and Computer Engineering

3. Michigan State University

4. East Lansing

5. USA

Abstract

A rapid and cost-effective method based on room-temperature, vapor-induced dewetting is developed to fabricate self-aligned microlens arrays on polymeric surfaces.

Funder

Division of Electrical, Communications and Cyber Systems

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Reference46 articles.

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2. Microlens arrays for integral imaging system

3. Integral imaging with improved depth of field by use of amplitude-modulated microlens arrays

4. M. S. Kim , K. W.Jo, J. H.Lee, K. B.Song, E. K.Kim and K. H.Park, Self-aligned microlens fabricated on the sidewall of 45°-angled optical fiber for NSOM illumination system, Int. Conf. Optical MEMS, Aug. 2003, pp. 18–19

5. Efficient implementation of a spatial light modulator as a diffractive optical microlens array in a digital Shack-Hartmann wavefront sensor

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