Additive fabrication of nanostructures with focused soft X-rays-Reference-Cited by-同舟云学术

Additive fabrication of nanostructures with focused soft X-rays

Published:2016 Issue:100 Volume:6 Page:98344-98349
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Späth Andreas¹²³⁴,Tu Fan¹²³⁴,Vollnhals Florian¹²³⁴,Drost Martin¹²³⁴,Krick Calderón Sandra¹²³⁴,Watts Benjamin⁵⁶⁷⁸,Fink Rainer H.¹²³⁴⁹^ORCID,Marbach Hubertus¹²³⁴

Affiliation:

1. Physikalische Chemie II and ICMM

2. Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)

3. 91058 Erlangen

4. Germany

5. Swiss Light Source (SLS)

6. Paul Scherrer Institute

7. 5232 Villigen

8. Switzerland

9. CENEM

Abstract

In a novel approach a high-resolution soft X-ray microscope has been applied to generate metallic nanostructures by X-ray beam induced decomposition of precursor molecules supplied from the gas phase.

Funder

Bundesministerium für Bildung und Forschung

Deutsche Forschungsgemeinschaft

European Cooperation in Science and Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA18214C

Reference56 articles.

1. Optical properties of nanostructured metal films