A high carrier-mobility crystalline silicon film directly grown on polyimide using SiCl4/H2 microwave plasma for flexible thin film transistors
Author:
Affiliation:
1. Department of Materials Science and Engineering
2. National Tsing Hua University
3. Hsinchu 30013
4. Republic of China
Abstract
Flexible Si-TFTs with a high carrier mobility of 106 cm2 V−1 s−1 are fabricated using SiCl4/H2 microwave plasma for the preparation of crystalline Si films.
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/TC/C5TC01395J
Reference34 articles.
1. Carrier transport, structure and orientation in polycrystalline silicon on glass
2. Low temperature polycrystalline silicon: a review on deposition, physical properties and solar cell applications
3. Piezoresistive pressure sensor using low-temperature aluminium induced crystallization of sputter-deposited amorphous silicon film
4. Fabrication of thin film silicon solar cells on plastic substrate by very high frequency PECVD
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