Excimer-laser photofragmentation of boron trichloride and its implications for laser vapour deposition and doping processes-Reference-Cited by-同舟云学术

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Excimer-laser photofragmentation of boron trichloride and its implications for laser vapour deposition and doping processes

Published:1994 Issue:24 Volume:90 Page:3633
ISSN:0956-5000
Container-title:Journal of the Chemical Society, Faraday Transactions
language:en
Short-container-title:Faraday Trans.

Author:

Georgiou S.,Raptakis E.,Xing X.,Hontzopoulos E.,Vlahoyannis Y. P.

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/1994/FT/FT9949003633

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Electron Interactions with Cl2, CCl2F2, BCl3, and SF6;Fundamental Electron Interactions with Plasma Processing Gases;2004

2. Electron Interactions With BCl3;Journal of Physical and Chemical Reference Data;2002-12

3. Diagnostic of Ar–BCl3 microwave discharges by optical emission spectroscopy;Surface and Coatings Technology;1997-12

4. Vacuum UV fluorescence excitation spectroscopy of BCl3. Electronic spectroscopy of BCl2, BCl2 + and BCl3 +;Journal of the Chemical Society, Faraday Transactions;1995

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