The pivotal role of oxygen interstitials in the dynamics of growth and movement of germanium nanocrystallites
Author:
Affiliation:
1. Department of Electrical Engineering and Center for Nano Science and Technology
2. National Central University
3. ChungLi, Republic of China
4. Department of Electronics Engineering
5. National Chiao Tung University
Abstract
An unusual “symbiotic” chain reaction is activated by oxygen interstitials acting in concert with Ge and Si interstitials, inducing the coalescence of sparsely-distributed Ge nanocrystallites and their autonomous migration within SiO2/Si3N4 layers.
Publisher
Royal Society of Chemistry (RSC)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/CE/C5CE00991J
Reference27 articles.
1. Silicon-Germanium Nanostructures for Light Emitters and On-Chip Optical Interconnects
2. Ge/Si Self-Assembled Quantum Dots and Their Optoelectronic Device Applications
3. Coarsening, Mixing, and Motion: The Complex Evolution of Epitaxial Islands
4. Evolution and coarsening of Si-rich SiGe islands epitaxially grown at high temperatures on Si(001)
5. Ge dots embedded in SiO2obtained by oxidation of Si/Ge/Si nanostructures
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