Author:
Kozhevnikov I. V.,Buzmakov A. V.,Siewert F.,Tiedtke K.,Störmer M.,Samoylova L.,Sinn H.
Abstract
A new phenomenon on X-ray optics surfaces has been observed: the growth of nano-dots (40–55 nm diameter, 8–13 nm height, 9.4 dots µm−2surface density) on the grazing-incidence mirror surface under irradiation by the free-electron laser (FEL) FLASH (5–45 nm wavelength, 3° grazing-incidence angle). With a model calculation it is shown that these nano-dots may occur during the growth of a contamination layer due to polymerization of incoming hydrocarbon molecules. The crucial factors responsible for the growth of nano-dots in the model are the incident peak intensity and the reflection angle of the beam. A reduction of the peak intensity (e.g.replacement of the FEL beam by synchrotron radiation) as well as a decrease of the incident angle by just 1° (from 3° to 2°) may result in the total disappearance of the nano-dots. The model calculations are compared with surface analysis of two FLASH mirrors.
Publisher
International Union of Crystallography (IUCr)
Subject
Instrumentation,Nuclear and High Energy Physics,Radiation
Reference25 articles.
1. Operation of a free-electron laser from the extreme ultraviolet to the water window
2. Anazawa, T., Nishiyama, Y., Oizumi, H., Suga, O. & Nishiyama, I. (2008). Proceedings of the International Symposium on Extreme Ultraviolet Lithography (Lake Tahoe, CA, USA, 28 September-1 October 2008, Vol. 3, p. 1611.
3. Application of X-ray scattering technique to the study of supersmooth surfaces
4. First operation of a free-electron laser generating GW power radiation at 32 nm wavelength
5. Barabási, A.-L. & Stanley, H. E. (1995). Fractal Concepts in Surface Growth. Cambridge University Press.
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献