Synchrotron-radiation X-ray topography of surface strain in large-diameter silicon wafers-Reference-Cited by-同舟云学术

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Synchrotron-radiation X-ray topography of surface strain in large-diameter silicon wafers

Published:2002-04-25 Issue:3 Volume:9 Page:166-168
ISSN:0909-0495
Container-title:Journal of Synchrotron Radiation
language:
Short-container-title:J Synchrotron Radiat

Author:

Kawado S.,Iida S.,Yamaguchi S.,Kimura S.,Hirose Y.,Kajiwara K.,Chikaura Y.,Umeno M.

Publisher

International Union of Crystallography (IUCr)

Subject

Instrumentation,Nuclear and High Energy Physics,Radiation

Link

http://journals.iucr.org/s/issues/2002/03/00/wl0003/wl0003.pdf

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