Uniform nucleation and epitaxy of bilayer molybdenum disulfide on sapphire-Reference-Cited by-同舟云学术

Uniform nucleation and epitaxy of bilayer molybdenum disulfide on sapphire

Published:2022-05-04 Issue:7908 Volume:605 Page:69-75
ISSN:0028-0836
Container-title:Nature
language:en
Short-container-title:Nature

Author:

Liu Lei,Li Taotao^ORCID,Ma Liang^ORCID,Li Weisheng,Gao Si,Sun Wenjie^ORCID,Dong Ruikang,Zou Xilu,Fan Dongxu,Shao Liangwei,Gu Chenyi,Dai Ningxuan,Yu Zhihao,Chen Xiaoqing,Tu Xuecou^ORCID,Nie Yuefeng^ORCID,Wang Peng^ORCID,Wang Jinlan^ORCID,Shi Yi^ORCID,Wang Xinran^ORCID

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

https://www.nature.com/articles/s41586-022-04523-5.pdf

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4. Cao, W., Kang, J., Sarkar, D., Liu, W. & Banerjee, K. 2D semiconductor FETs—projections and design for sub-10 nm VLSI. IEEE Trans. Electron Devices 62, 3459–3469 (2015).

5. Agarwal, T. et al. Benchmarking of MoS2 FETs with multigate Si-FET options for 5 nm and beyond. IEEE Trans. Electron Devices 62, 4051–4056 (2015).

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