Approaching the quantum limit in two-dimensional semiconductor contacts-Reference-Cited by-同舟云学术

Approaching the quantum limit in two-dimensional semiconductor contacts

Published:2023-01-11 Issue:7943 Volume:613 Page:274-279
ISSN:0028-0836
Container-title:Nature
language:en
Short-container-title:Nature

Author:

Li Weisheng^ORCID,Gong Xiaoshu^ORCID,Yu Zhihao,Ma Liang^ORCID,Sun Wenjie,Gao Si,Köroğlu Çağıl,Wang Wenfeng,Liu Lei,Li Taotao^ORCID,Ning Hongkai^ORCID,Fan Dongxu,Xu Yifei,Tu Xuecou^ORCID,Xu Tao^ORCID,Sun Litao^ORCID,Wang Wenhui,Lu Junpeng^ORCID,Ni Zhenhua^ORCID,Li Jia^ORCID,Duan Xidong^ORCID,Wang Peng^ORCID,Nie Yuefeng^ORCID,Qiu Hao,Shi Yi^ORCID,Pop Eric^ORCID,Wang Jinlan^ORCID,Wang Xinran^ORCID

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Link

https://www.nature.com/articles/s41586-022-05431-4.pdf

Reference53 articles.

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2. Ahmed, Z. et al. Introducing 2D-FETs in device scaling roadmap using DTCO. In 2020 IEEE International Electron Devices Meeting 22.5.1–22.5.4 (IEEE, 2020); https://doi.org/10.1109/Iedm13553.2020.9371906.

3. Wang, Y. & Chhowalla, M. Making clean electrical contacts on 2D transition metal dichalcogenides. Nat. Rev. Phys. 4, 101–112 (2022).

4. Wang, Y. et al. Van der Waals contacts between three-dimensional metals and two-dimensional semiconductors. Nature 568, 70–74 (2019).

5. Kappera, R. et al. Phase-engineered low-resistance contacts for ultrathin MoS2 transistors. Nat. Mater. 13, 1128–1134 (2014).

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