Electrolithography- A New and Versatile Process for Nano Patterning
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/srep17753.pdf
Reference30 articles.
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4. Pimpin, A. & Srituravanich, W. Reviews on Micro- And Nanolithography Techniques and their Applications. Eng. J. 16, 36–55 (2012).
5. Tseng, A. A., Chen, K., Chen, C. D. & Ma, K. J. Electron Beam Lithography in Nanoscale Fabrication: Recent Development. IEEE. T. Electron. Pa. M. 26, 141–149 (2003).
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