Author:
Szakmany Gergo P.,Bernstein Gary H.,Kinzel Edward C.,Orlov Alexei O.,Porod Wolfgang
Abstract
AbstractWe investigate the generation of electrical signals by suspended thermoelectrically coupled nanoantennas (TECNAs) above a quasi-spherical reflector cavity in response to rapidly changing long-wave infrared radiation. These sensors use a resonant nanoantenna to couple the IR energy to a nanoscale thermocouple. They are positioned over a cavity, etched into the Si substrate, that provides thermal isolation and is designed as an optical element to focus the IR radiation to the antenna. We study the frequency-dependent response of such TECNAs to amplitude-modulated 10.6 μm IR signals. We experimentally demonstrate response times on the order of 3 μs, and a signal bandwidth of about 300 kHz. The observed electrical response is in excellent correlation with finite element method simulations based on the thermal properties of nanostructures. Both experiments and simulations show a key trade-off between sensitivity and response time for such structures and provide solutions for specific target applications.
Funder
National Aeronautics and Space Administration
NSF CMMI
Publisher
Springer Science and Business Media LLC
Reference25 articles.
1. Rogalski, A. Next Decade in Infrared Detectors Vol. 10433 ESD (SPIE, Bellingham, 2017).
2. Murphy, D. et al.High Sensitivity 640 x 512 (20 mm Pitch) Microbolometer FPAs Vol. 6206 SI (SPIE, Bellingham, 2006).
3. Tissot, J. L., Trouilleau, C., Fieque, B., Crastes, A. & Legras, O. Uncooled microbolometer detector: recent developments at ULIS. Opto-Electron. Rev.14, 25–32. https://doi.org/10.2478/s11772-006-0004-2 (2006).
4. Skidmore, G. D. & Howard, C. G. Pixel structure having an umbrella type absorber with one or more recesses or channels sized to increase radiation absorption. USA patent 20090140147 (2009).
5. Erturk, O. & Akin, T. Design and implementation of high fill-factor structures for low-cost CMOS microbolometers. In 2018 IEEE Micro Electro Mechanical Systems (MEMS) 692–695 (2018).
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