Enhanced accuracy through machine learning-based simultaneous evaluation: a case study of RBS analysis of multinary materials

Author:

Magchiels Goele,Claessens Niels,Meersschaut Johan,Vantomme André

Abstract

AbstractWe address the high accuracy and precision demands for analyzing large in situ or in operando spectral data sets. A dual-input artificial neural network (ANN) algorithm enables the compositional and depth-sensitive analysis of multinary materials by simultaneously evaluating spectra collected under multiple experimental conditions. To validate the developed algorithm, a case study was conducted analyzing complex Rutherford backscattering spectrometry (RBS) spectra collected in two scattering geometries. The dual-input ANN analysis excelled in providing a systematic analysis and precise results, showcasing its robustness in handling complex data and minimizing user bias. A comprehensive comparison with human supervision analysis and conventional single-input ANN analysis revealed a reduced susceptibility of the dual-input ANN analysis to inaccurately known setup parameters, a common challenge in material characterization. The developed multi-input approach can be extended to a wide range of analytical techniques, in which the combined analysis of measurements performed under different experimental conditions is beneficial for disentangling details of the material properties.

Funder

Fonds Wetenschappelijk Onderzoek

EU infrastructure network RADIATE

Publisher

Springer Science and Business Media LLC

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Analysis of Rutherford backscattering spectra with CNN-GRU mixture density network;Scientific Reports;2024-07-23

2. A machine learning approach to self-consistent RBS data analysis and combined uncertainty evaluation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2024-06

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