Manipulating the adhesion of electroless nickel-phosphorus film on silicon wafers by silane compound modification and rapid thermal annealing
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-017-08639-x.pdf
Reference28 articles.
1. Michel, B. et al. Printing meets lithography: Soft approaches to high-resolution patterning. IBM J. Res. Develop. 45, 697–719 (2001).
2. Rao, C. R. & Trivedi, D. Chemical and electrochemical depositions of platinum group metals and their applications. Coord. Chem. Rev. 249, 613–631 (2005).
3. Schlesinger, M. Electroless deposition of nickel. Modern electroplating 4, 667–684 (2000).
4. Shacham-Diamand, Y., Dubin, V. & Angyal, M. Electroless copper deposition for ULSI. Thin Solid Films 262, 93–103 (1995).
5. Zabetakis, D. & Dressick, W. J. Selective electroless metallization of patterned polymeric films for lithography applications. ACS Appl. Mat. Interfaces 1, 4–25 (2009).
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