Self-structuring in Zr1−xAlxN films as a function of composition and growth temperature
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-018-34279-w.pdf
Reference48 articles.
1. Adibi, F. et al. Defect structure and phase transitions in epitaxial metastable cubic Ti0.5Al0.5N alloys grown on MgO(001) by ultra-high-vacuum magnetron sputter deposition. Journal of Applied Physics 69, 6437–6450 (1991).
2. Hörling, A., Hultman, L., Odén, M., Sjölén, J. & Karlsson, L. Thermal stability of arc evaporated high aluminum-content Ti1-xAlxN thin films. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 20, 1815–1823 (2002).
3. Mayrhofer, P. H. et al. Self-organized nanostructures in the Ti-Al-N system. Applied Physics Letters 83, 2049–2051 (2003).
4. Höglund, C. et al. Effects of volume mismatch and electronic structure on the decomposition of ScAlN and TiAlN solid solutions. Physical Review B 81, 224101 (2010).
5. Rotert, S. J., Music, D., Baben, M. T. & Schneider, J. M. Theoretical study of elastic properties and phase stability of M0.5Al0.5N1−xOx (M = Sc, Ti, V, Cr). Journal of Applied Physics 113, 083512, https://doi.org/10.1063/1.4793496 (2013).
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