Numerical and Experimental Investigation into LWIR Transmission Performance of Complementary Silicon Subwavelength Antireflection Grating (SWARG) Structures
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://www.nature.com/articles/s41598-019-41107-2.pdf
Reference20 articles.
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3. Gooch, R. & Schimert, T. Low-Cost Wafer-Level Vacuum Packaging for MEMS. MRS Bull. 28, 55–59 (2003).
4. Cox, J. T. Special Type of Double-Layer Antireflection Coating for Infrared Optical Materials with High Refractive Indices. J. Opt. Soc. Am. 51, 1406 (1961).
5. Cox, J. T. & Hass, G. Antireflection Coatings for Germanium and Silicon in the Infrared. J. Opt. Soc. Am. 48, 677–680 (1958).
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