Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom-Reference-Cited by-同舟云学术

Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom

Published:2019-10 Issue:10 Volume:2 Page:464-470
ISSN:2520-1131
Container-title:Nature Electronics
language:en
Short-container-title:Nat Electron

Author:

Holler Mirko^ORCID,Odstrcil Michal,Guizar-Sicairos Manuel^ORCID,Lebugle Maxime,Müller Elisabeth,Finizio Simone^ORCID,Tinti Gemma,David Christian,Zusman Joshua,Unglaub Walter,Bunk Oliver^ORCID,Raabe Jörg^ORCID,Levi A. F. J.,Aeppli Gabriel

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://www.nature.com/articles/s41928-019-0309-z.pdf

Reference41 articles.

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2. Shahmoradian, S. et al. Three-dimensional imaging of biological tissue by cryo X-ray ptychography. Sci. Rep. 7, 6291 (2017).

3. Servanton, G. et al. Advanced TEM characterization for the development of 28-14 nm nodes based on fully-depleted silicon-on-insulator technology. J. Phys.Conf. Ser. 471, 01202 (2013).

4. Gignac, L. M. et al. High energy BSE/SE/STEM imaging of 8 um thick semiconductor interconnects. Microsc. Microanal. 20(S3), 8–9 (2014).

5. Holler, M. et al. High-resolution non-destructive three-dimensional imaging of integrated circuits. Nature 543, 402 (2017).

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