A polymer–semiconductor–ceramic cantilever for high-sensitivity fluid-compatible microelectromechanical systems-Reference-Cited by-同舟云学术

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A polymer–semiconductor–ceramic cantilever for high-sensitivity fluid-compatible microelectromechanical systems

Published:2024-07-15 Issue:7 Volume:7 Page:567-575
ISSN:2520-1131
Container-title:Nature Electronics
language:en
Short-container-title:Nat Electron

Author:

Hosseini Nahid^ORCID,Neuenschwander Matthias^ORCID,Adams Jonathan D.^ORCID,Andany Santiago H.,Peric Oliver,Winhold Marcel,Giordano Maria Carmen^ORCID,Bhat Vinayak Shantaram,Penedo Marcos^ORCID,Grundler Dirk^ORCID,Fantner Georg E.^ORCID

Publisher

Springer Science and Business Media LLC

Link

https://www.nature.com/articles/s41928-024-01195-z.pdf

Reference39 articles.

1. Meyer, G. & Amer, N. M. Novel optical approach to atomic force microscopy. Appl. Phys. Lett. 53, 1045–1047 (1988).

2. Tortonese, M., Yamada, H., Barrett, R. C. & Quate, C. F. Atomic force microscopy using a piezoresistive cantilever. In TRANSDUCERS'91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers 448–451 (IEEE, 1991); https://doi.org/10.1109/SENSOR.1991.148908

3. Minne, S. C., Manalis, S. R. & Quate, C. F. Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators. Appl. Phys. Lett. 67, 3918–3920 (1995).

4. Watanabe, S. & Fujii, T. Micro‐fabricated piezoelectric cantilever for atomic force microscopy. Rev. Sci. Instrum. 67, 3898–3903 (1996).

5. Harley, J. A. & Kenny, T. W. High-sensitivity piezoresistive cantilevers under 1000 Å thick. Appl. Phys. Lett. 75, 289–291 (1999).

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