Author:
Thuau Damien,Laval Cédric,Dufour Isabelle,Poulin Philippe,Ayela Cédric,Salmon Jean-Baptiste
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Materials Science (miscellaneous),Atomic and Molecular Physics, and Optics
Reference39 articles.
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5. Kim, B. J. & Meng, E. Review of polymer MEMS micromachining. J. Micromech. Microeng. 26, 013001 (2016).
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