1. Norte, R. A. Nanofabrication for On-Chip Optical Levitation, Atom-Trapping, and Superconducting Quantum Circuits. PhD thesis, California Institute of Technology (2015).
2. Stanford Nanofabrication Facility. https://snfexfab.stanford.edu/snf/projects-processes/processes
3. Birck Nanotechnology Center. https://www.purdue.edu/discoverypark/birck/
4. Bereyhi, M. https://nanofab-net.org/media/Al2O3_LPCVD_pinhole.pdf
5. Zenodo. http://zenodo.org