Selective Chemical Vapor Deposition of Platinum and Palladium Directed by Monolayers Patterned Using Microcontact Printing-Reference-Cited by-同舟云学术

Selective Chemical Vapor Deposition of Platinum and Palladium Directed by Monolayers Patterned Using Microcontact Printing

Published:1997-07-01 Issue:14 Volume:13 Page:3833-3838
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Jeon Noo Li¹,Lin Wenbin¹,Erhardt Martin K.¹,Girolami Gregory S.¹,Nuzzo Ralph G.¹

Affiliation:

1. Department of Materials Science & Engineering, School of Chemical Sciences, and The Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la970167e

Reference38 articles.

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2. Process Integration for Nonvolatile Ferroelectric Memory Fabrication

3. Singer, P.Semicond.Ind.1995, (Dec), 65−68.

4. Taylor, M.Semicond.Int.1996, (July), 162.

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