1. Xinjiang Key Laboratory of Electronic Information Materials and Devices, Xinjiang Technical Institute of Physics & Chemistry, Chinese Academy of Sciences, Urumqi 830011, China
2. Graduate University of Chinese Academy of Sciences, Beijing 100049, China
3. State Key Laboratory of Optical Technologies for MicroFabrication & MicroEngineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China