Patterning of Nanoporous Anodic Aluminum Oxide Arrays by Using Sol−Gel Processing, Photolithography, and Plasma Etching
Author:
Affiliation:
1. Department of Chemical and Nuclear Engineering and Department of Chemistry, Center for Micro-Engineered Materials, The University of New Mexico, Albuquerque, New Mexico 87131
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm034553v
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