1. Microelectronic R&D Center, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
2. Key Laboratory of Advanced Display and System Applications, Ministry of Education, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
3. Light, Nanomaterials, Nanotechnologies (L2n) Laboratory, CNRS ERL 7004, University of Technology of Troyes, 12 rue Marie Curie, Troyes, Cedex 10004, France
4. Laboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China