1. Key Laboratory of Microelectronics Devices & Integration Technology, Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. Wuhan National Laboratory for Optoelectronics, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
4. School of Microelectronics, University of Science and Technology of China, Hefei, Anhui 230026, China
5. Structured Materials Industries Inc., Piscataway, New Jersey 08854, United States
6. Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM), Nanjing, Jiangsu 210023, China