1. Faculty of Physics and Earth System Sciences, Felix Bloch Institute for Solid State Physics, Applied Quantum Systems, Leipzig University, Linnéstrasse 5, 04103 Leipzig, Germany
2. Leibniz Joint Lab, “Single Ion Implantation”, 04318 Leipzig, Germany
3. Leibniz Institute of Surface Engineering (IOM), Permoserstrasse 15, 04318 Leipzig, Germany
4. Institute of Nanostructure Technologies and Analytics, Technological Physics, University of Kassel, Heinrich-Plett-Str. 40, 34132 Kassel, Germany