1. Singapore University of Technology and Design, 8 Somapah Road, Singapore 487372, Singapore
2. Institute of Microelectronics (IME), Agency for Science, Technology and Research (A*STAR), 2 Fusionopolis Way, Innovis #08-02, Singapore 138634, Singapore
3. Center for Intelligent Sensors and MEMS, Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117583, Singapore
4. School of Engineering, University of Birmingham, Edgbaston, Birmingham B15 2TT, United Kingdom