Heterogeneous and Monolithic 3D Integration of III–V-Based Radio Frequency Devices on Si CMOS Circuits

Author:

Jeong Jaeyong1,Kim Seong Kwang1,Kim Jongmin2,Geum Dae-Myeong1ORCID,Kim Duckhyun1,Jo Eunju3,Jeong Hakcheon1,Park Juyeong4,Jang Jae-Hyung45ORCID,Choi Shinhyun1,Kwon Inyong36,Kim Sanghyeon1ORCID

Affiliation:

1. School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea

2. Division of Device Technology, Korea Advanced Nano Fab Center (KANC), Suwon 16229, Republic of Korea

3. Korea Atomic Energy Research Institute (KAERI), Daejeon 34057, Republic of Korea

4. School of Electrical Engineering and Computer Science, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Republic of Korea

5. School of Energy Engineering, Korea Institute of Energy Technology (KENTECH), Naju 58330, Republic of Korea

6. Department of Nuclear and Radiation Safety, Korea University of Science and Technology (UST), Daejeon 34113, Republic of Korea

Funder

National Research Foundation of Korea

BK21 FOUR

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

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