1. Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, 1068 Xueyuan Avenue, Shenzhen, 518055 Guangdong Province, P. R. China
2. Institute for Biomedical Materials and Devices, School of Mathematical and Physical Sciences, Faculty of Science, University of Technology Sydney, 15 Broadway, Ultimo, NSW 2007, Australia
3. Micro- and NanoBiomedical Engineering Group (MNBE), Institute for Integrative Nanosciences, Leibniz Institute for Solid State and Materials Research (IFW), 01069 Dresden, Germany
4. Chair of Micro- and NanoSystems, Center for Molecular Bioengineering (B CUBE), Dresden University of Technology, 01062 Dresden, Germany
5. Universitat de Barcelona, Departament de Ciència dels Materials i Química Física, Institut de Química Teòrica i Computacional Barcelona, 08028 Barcelona, Spain
6. Helmholtz-Zentrum Dresden-Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Bautzner Landstrasse 400, 01328 Dresden, Germany