1. Department of Bioengineering and Biomolecular Nanotechnology Center, Berkeley Sensor and Actuator Center and University of California, Berkeley, California 94720, United States
2. Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109, United States
3. Department of Biomedical Engineering, Michigan Technological University, Houghton, Michigan 49931, United States
4. Department of Electrical & Computer Engineering, Department of Biomedical Engineering, Applied Physics, Biointerfaces Institute, Macromolecular Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109, United States
5. Department of Electrical Engineering and Computer Science, University of California, Berkeley, California 94720, United States
6. Harvard Institute of Medicine, Harvard Medical School, Department of Medicine, Brigham and Women’s Hospital, Harvard University, Boston, Massachusetts 02115 United States
7. Institute of Quantum Biophysics, Department of Biophysics, Sungkyunkwan University, Suwon 16419, Korea