1. Department of Materials Science and Engineering & Center of Super-Diamond and Advanced Films, College of Engineering, City University of Hong Kong, 83 Tat Chee Avenue, Kowloon 999077, Hong Kong SAR, China
2. Institute of Applied Physics and Materials Engineering, University of Macau, Taipa 999078, Macau SAR, China
3. Siyuan Laboratory, Guangdong Provincial Engineering Technology Research Center of Vacuum Coating Technologies and New Materials, Department of Physics, Jinan University, Guangzhou 510632, China
4. Institute of Photoelectronic Thin Film Devices and Technology, College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China