Controlled Spacing between Nanopatterned Regions in Block Copolymer Films Obtained by Utilizing Substrate Topography for Local Film Thickness Differentiation-Reference-Cited by-同舟云学术

Controlled Spacing between Nanopatterned Regions in Block Copolymer Films Obtained by Utilizing Substrate Topography for Local Film Thickness Differentiation

Published:2019-09-04 Issue:38 Volume:11 Page:35247-35254
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Michman Elisheva¹,Langenberg Marcel²,Stenger Roland²,Oded Meirav¹,Schvartzman Mark³^ORCID,Müller Marcus²^ORCID,Shenhar Roy¹^ORCID

Affiliation:

1. The Institute of Chemistry and the Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 9190401, Israel

2. Institute for Theoretical Physics, Georg-August-University Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany

3. Department of Materials Engineering and Ilse Katz Institute for Nanoscale Science and Technology, Ben Gurion University of the Negev, Beer Sheva 8410501, Israel

Funder

Israel Science Foundation

Deutsche Forschungsgemeinschaft

CAMBR Charitable Foundation

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.9b12817

Reference74 articles.

1. Functional and nonlinear optical metasurfaces