Syntheses, Structures, and Thermal Behavior of Cu(hfacac) Complexes Derived from Ethanolamines
Author:
Affiliation:
1. Departments of Chemistry and Physics and Molecular Structure Center, Indiana University, Bloomington, Indiana 47405-4001
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ic960370h
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1. Mechanistic Role of H2O and the Ligand in the Chemical Vapor Deposition of Cu, Cu2O, CuO, and Cu3N from Bis(1,1,1,5,5,5-hexafluoropentane-2,4-dionato)copper(II)
2. Photochemical generation and deposition of copper from a gas phase precursor
3. Surface processes leading to carbon contamination of photochemically deposited copper films
4. Device‐quality copper using chemical vapor deposition of β‐diketonate source precursors in liquid solution
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