1. Center for Micro- and Nanotechnologies, Faculty of Electrical Engineering and Information Technology, Chemnitz University of Technology, Reichenhainer Str. 70, 09126 Chemnitz, Germany
2. Fraunhofer Institute for Electronic Nanosystems ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany
3. Professorship of Chemical Technology, Faculty of Natural Science, Chemnitz University of Technology, Straße der Nationen 62, 09111 Chemnitz, Germany
4. Professorship of Smart Systems Integration, Faculty of Electrical Engineering and Information Technology, Chemnitz University of Technology, Reichenhainer Str. 70, 09126 Chemnitz, Germany