Porous Membranes as Sacrificial Layers Enabling Conformal Chemical Vapor Deposition Involving Multiple Film-Forming Species

Author:

Shima Kohei1ORCID,Funato Yuichi1,Sato Noboru1,Fukushima Yasuyuki2,Momose Takeshi1,Shimogaki Yukihiro1

Affiliation:

1. Department of Materials Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan

2. Advanced Applied Science Department Research Laboratory, IHI Corporation, Isogo, Yokohama 235-8501, Japan

Funder

Ministry of Economy, Trade and Industry

Japan Society for the Promotion of Science

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Reference50 articles.

1. Al-Doped TiO2 Films with Ultralow Leakage Currents for Next Generation DRAM Capacitors

2. Mesoporous catalytic membranes: Synthetic control of pore size and wall composition

3. Brennfleck, K.; Fitzer, E.; Schoch, G.; Dietrich, M. CVD of SiC-Interlayers and Their Interaction with Carbon Fibers and with Multilayered NbN-Coatings. Proceedings of the 9th International Conference on Chemical Vapor Deposition; Pennington, 1984; pp 649–662.

4. A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches

5. Conformality in atomic layer deposition: Current status overview of analysis and modelling

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