Thermodynamic Analysis of Hybrid Chemical Vapor Deposition of Transition-Metal-Alloyed Group-III-Nitride ScAlN Piezoelectric Semiconductor Films-Reference-Cited by-同舟云学术

Thermodynamic Analysis of Hybrid Chemical Vapor Deposition of Transition-Metal-Alloyed Group-III-Nitride ScAlN Piezoelectric Semiconductor Films

Published:2022-02-17 Issue:4 Volume:22 Page:2239-2247
ISSN:1528-7483
Container-title:Crystal Growth & Design
language:en
Short-container-title:Crystal Growth & Design

Author:

Moradnia Mina¹²,Pouladi Sara¹²,Chen Jie¹³²,Kim Nam-In³²,Aigbe Onosetale¹,Ryou Jae-Hyun¹³²^ORCID

Affiliation:

1. Department of Mechanical Engineering, University of Houston, Houston, Texas 77204-4006, United States

2. Texas Center for Superconductivity at UH (TcSUH) and Advanced Manufacturing Institute (AMI), University of Houston, Houston, Texas 77204, United States

3. Materials Science and Engineering Program, University of Houston, Houston, Texas 77204, United States

Funder

Texas Center for Superconductivity, University of Houston

Advanced Manufacturing Institute, University of Houston

Publisher

American Chemical Society (ACS)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.cgd.1c01331

Reference25 articles.

1. Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

2. Microstructure and piezoelectric response of Y Al1−N thin films

3. Increased electromechanical coupling in w−ScxAl1−xN

4. Origin of the Anomalous Piezoelectric Response in WurtziteScxAl1−xNAlloys

5. Epitaxial Aluminum Scandium Nitride Super High Frequency Acoustic Resonators

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