Formation of Polymerizable Monomer Langmuir−Blodgett Films with Polyfluorocarbon Chains for Use in High-Resolution Negative Resists
Author:
Affiliation:
1. Institute for Chemical Reaction Science, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-77, Japan
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ma9612539
Reference19 articles.
1. Recent studies on functional ultrathin polymer films prepared by the Langmuir-Blodgett technique
2. Polymerization of N-octadecylacrylamide in Langmuir-Blodgett multilayers
3. Drawing fine patterns on N-octadecylacrylamide Langmuir-Blodgett multilayers: a new class of ultrathin resists
4. Characterization of an N-octadecylacrylamide Langmuir-Blodgett film for application as an electron beam resist
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