In Situ Quartz Crystal Microbalance and Quadrupole Mass Spectrometry Studies of Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum and Water-Reference-Cited by-同舟云学术

In Situ Quartz Crystal Microbalance and Quadrupole Mass Spectrometry Studies of Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum and Water

Published:2001-09-18 Issue:21 Volume:17 Page:6506-6509
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Rahtu Antti¹,Alaranta Teemu¹,Ritala Mikko¹

Affiliation:

1. Laboratory of Inorganic Chemistry, University of Helsinki, P.O. Box 55, FIN-00014 Helsinki, Finland

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la010103a

Reference34 articles.

1. Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

2. High-resolution depth profiling in ultrathin Al2O3 films on Si

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