Density Functional Theory Predictions of the Composition of Atomic Layer Deposition-Grown Ternary Oxides
Author:
Affiliation:
1. Tyndall National Institute, University College Cork, Dyke Parade, Cork, Ireland
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/am400310p
Reference44 articles.
1. Atomic Layer Deposition: An Overview
2. Applications of atomic layer deposition to nanofabrication and emerging nanodevices
3. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
4. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials
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