1. Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, China, 116024.
2. School of Biomedical Engineering, Faculty of Medicine, Dalian University of Technology, Dalian, China, 116024.
3. Centre for Advanced Laser Manufacturing (CALM), School of Mechanical Engineering, Shandong University of Technology, Zibo, China, 255000.
4. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian, China, 116024.