Ultralarge-Area Block Copolymer Lithography Enabled by Disposable Photoresist Prepatterning
Author:
Affiliation:
1. Department of Materials Science and Engineering, KI for the Nanocentury, KAIST, Daejeon, 305-701, Republic of Korea
2. LCD R & D Center, Samsung Electronics San#24 Nongseo-dong, Giheung-gu, Yongin-city, Gyeonggi-do 446-711, Republic of Korea
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/nn101212q
Reference35 articles.
1. Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes
2. Evolution of Block Copolymer Lithography to Highly Ordered Square Arrays
3. Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter
4. Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates
5. Hierarchical Self-Assembly of Block Copolymers for Lithography-Free Nanopatterning
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