Mechanism of Phenolic Polymer Dissolution: Importance of Acid−Base Equilibria
Author:
Affiliation:
1. Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712, and IBM Almaden Research Center, 650 Harry Road, San Jose, California 95126
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ma990271y
Reference31 articles.
1. Dammel, R. R.Diazonaphthoquinone-based Resists; SPIE Press: Bellingham, WA, 1993.
2. The Mechanism of Phenolic Polymer Dissolution: A New Perspective
3. pK a Prediction for Organic Acids and Bases
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