1. Department of Material Science and Engineering, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan
2. Taiwan Semiconductor Manufacturing Company, Hsinchu 30078, Taiwan
3. Department of Electrophysics, National Yang Ming Chiao Tung University, Hsinchu 30010, Taiwan
4. Institute of Photonics and Optoelectronics & Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan
5. Department of Mechanical Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong 999077