Mechanical Properties and Interface Characteristics of Nanoporous Low-k Materials
Author:
Affiliation:
1. State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
2. School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
Funder
China Postdoctoral Science Foundation
National Natural Science Foundation of China
Tribology Science Fund of State Key Laboratory of Tribology
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/am503236m
Reference52 articles.
1. Interface engineering for high interfacial strength between SiCOH and porous SiCOH interconnect dielectrics and diffusion caps
2. Low dielectric constant materials for microelectronics
3. The Effect of Plasma Chemistry on the Damage Induced to Porous SiCOH Dielectrics
4. Low Dielectric Constant Materials
5. Plasma processing of low-k dielectrics
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