1. School of Microelectronics, Fudan University, Shanghai 200433, China
2. Department of Optical Science and Engineering, and School of Information Science and Technology, Fudan University, Shanghai 200433, China
3. State Key Laboratory of Advanced Special Steel & Shanghai Key Laboratory of Advanced Ferrometallurgy & School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China
4. Hubei Yangtz Memory Laboratories, Wuhan 430205, China
5. Jiashan Fudan Institute, Jiashan 314100, China