1. School of Microelectronics, Shandong University, Ji’nan 250100, China
2. Tianjin Key Lab for Rare Earth Materials and Applications, Center for Rare Earth and Inorganic Functional Materials, School of Materials Science and Engineering, Nankai University, Tianjin 300350, China
3. State Key Laboratory of Crystal Materials, Institute of Novel Semiconductors, Institute of Crystal Materials, Shandong University, Jinan 250100, Shandong, China
4. Shandong Research Institute of Industrial Technology, Jinan 250100, Shandong, China
5. Shenzhen Research Institute of Shandong University, Shenzhen 518057, China