Autocatalytic Fragmentation of Acetoacetate Derivatives as Acid Amplifiers to Proliferate Acid Molecules-Reference-Cited by-同舟云学术

Autocatalytic Fragmentation of Acetoacetate Derivatives as Acid Amplifiers to Proliferate Acid Molecules

Published:1998-01-01 Issue:1 Volume:120 Page:37-45
ISSN:0002-7863
Container-title:Journal of the American Chemical Society
language:en
Short-container-title:J. Am. Chem. Soc.

Author:

Arimitsu Koji¹,Kudo Kazuaki¹,Ichimura Kunihiro¹

Affiliation:

1. Contribution from the Research Laboratory of Resources Utilization, Tokyo Institute of Technology, 4259 Nagatsuta, Midori-ku, Yokohama 226, Japan, and Institute of Industrial Science, University of Tokyo, 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan

Publisher

American Chemical Society (ACS)

Subject

Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis

Link

https://pubs.acs.org/doi/pdf/10.1021/ja972353c

Reference24 articles.

1. The Chemistry of Polymers for Microlithographic Applications

2. Autocatalytic Decomposition of A β-Tosyloxy-Ketone Acetal as an Acid Amplifier

3. Novel Resist Materials Using Acid Amplifiers. Part II.

4. Characterization of Chemically Amplified Resists with "Acid Amplifier" for 193 nm Lithography.

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