Organic Depth Profiling of a Nanostructured Delta Layer Reference Material Using Large Argon Cluster Ions

Author:

Lee J. L. S.1,Ninomiya S.1,Matsuo J.1,Gilmore I. S.1,Seah M. P.1,Shard A. G.1

Affiliation:

1. National Physical Laboratory, Teddington, Middlesex, TW11 0LW, United Kingdom, Quantum Science and Engineering Centre, Kyoto University, Uji, Kyoto, 611-0011, Japan, and CREST, Japan Science and Technology Agency (JST), Chiyoda, Tokyo, 102-0075, Japan

Publisher

American Chemical Society (ACS)

Subject

Analytical Chemistry

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